STS installs Pegasus DRIE cluster systems for Korea’s NIA
Surface Technology Systems plc (STS), a leader in plasma process technologies required in the manufacturing and packaging of micro electromechanical systems (MEMS) and advanced electronic devices, today announced that they have installed two VPX Pegasus cluster tools for the ...

EV Group receives multiple-system ordersfrom leading European universities for innovative MEMS research & development
EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, announced that three European universities -- Southampton University, University of Ulster and Technische Universitat Braunschweig -- have ...